C-TEFs : Center for Integrated Research of Future Electronics, Transformative Electronics Facilities

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C-TEFs : Center for Integrated Research of Future Electronics, Transformative Electronics Facilities

The Center for Integrated Research of Future Electronics ‒ Transformative Electronics Facilities（ C-TEFs） is an experimental facility of IMaSS at Nagoya University. It has a large clean room of about 1,000 m²（ Class 1,000 exposure area; Class 10,000 process area） for conducting accelerated crystal growth, device processes, and evaluation in GaN research and development.

original web site

Movies

introduction（2m37s）

Features

(１) Submicron processing line specialized for GaN Electronics

Complete end-to-end process of GaN power devices from crystal growth to device fabrication
Equipment capable of submicron feature fabrication, including an i-line stepper
Operation management and contract fabrication services by technical development staff
Shared user facility system with fee structure to allow use by outside organizations